About: http://webisa.webdatacommons.org/170647175

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The second interlayer insulating film 541 is formed of an organic insulating material such as polyimide, acrylic, polyimiamide, and BCB (benzocyclobutene).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com