About: http://webisa.webdatacommons.org/17070485

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular embodiments of the present invention, the first barrier layer 12 may be provided as a substrate, such as an AlN substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au