About: http://webisa.webdatacommons.org/170742182

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This process is a variation of the basic chemical vapor deposition process; only the chemical nature of the precursors or starting materials are different.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es