About: http://webisa.webdatacommons.org/170860113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, there is a problem in that the quartz window having a reduced thickness cannot be used for a process chamber which forms a negative pressure therein.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com