About: http://webisa.webdatacommons.org/170904291

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The atmosphere within a processing chamber can be very harmful to materials such as quartz and can shorten the life span of parts made from such materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com