About: http://webisa.webdatacommons.org/17093016

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1B is a schematic diagram showing an enlarged portion of the interconnect structure of FIG. 1B, which shows air gaps formed according to the disclosed embodiments.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com