About: http://webisa.webdatacommons.org/170958807

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	While polysilicon is the preferred material, other suitable gate materials include tungsten, tungsten-silicon alloys, aluminum, or other similar materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com