About: http://webisa.webdatacommons.org/170968306

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The contact openings are ultimately filled with some suitable conductive material, for example tungsten with or without conductive barrier layer materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca