About: http://webisa.webdatacommons.org/171154123

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first dielectric layer 20 is preferably formed by using suitable material such as borophosphosilicate glass (BPSG), silicon nitride or silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de