About: http://webisa.webdatacommons.org/171374490

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first insulating layer 20 can be formed on any insulating material including silicon oxide, silicon oxynitride and silicon nitride and any combination of insulative layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com