About: http://webisa.webdatacommons.org/171377559

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The co-implant may introduce elements such as Si, F, O, N, or Ar into the strained layer 118.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com