About: http://webisa.webdatacommons.org/171418689

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The alloy of aluminum and silicon was formed thereon as a material for a gate electrode 107, at a thickness of 3000 ??? to 1.5 ??m, e.g. at 1 ??m, by a known sputtering method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com