| http://www.w3.org/ns/prov#value | - The plate line 34 is formed of platinum (Pt), the ferroelectric line 36 is formed of PZT, PLZT, PNZT, PbTiO3 or Y1, the semiconductor layer 38 is formed of an oxide such as SnO2, and the word line 40 is formed of a material having a high work function, e.g., polysilicon doped with an impurity or aluminum, in order to reduce leakage current.
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