About: http://webisa.webdatacommons.org/17175561

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic cross section of an example of a thin film forming apparatus according to the invention, and particularly a radical emission plasma CVD apparatus;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com