| http://www.w3.org/ns/prov#value | - The lower insulating film comprises, for example, a single-layer film such as a silicon oxide film or a silicon nitride film, a double-layer film such as silicon nitride film/silicon oxide film or silicon oxide film/silicon nitride film, or a triple-layer film such as an silicon oxide film/silicon nitride film/silicon oxide film (ONO film).
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