About: http://webisa.webdatacommons.org/171942368

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 14 wherein said polish stop layer is a material selected from the group consisting of Si3N4, SiC, amorphous carbon, hydrogenated Si3N4 and hydrogenated SiC.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com