About: http://webisa.webdatacommons.org/171965595

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface of a MEMS device is delicate and may consist of several different materials such as silicon, silicon oxide, silicon nitride, and/or metals such as gold or aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com