About: http://webisa.webdatacommons.org/171981024

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1 wherein said silicon or silicon alloy surface is a silicon or silicon alloy film formed on an oxide film formed on a single crystalline silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es