About: http://webisa.webdatacommons.org/171999977

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The exposure process using a light shielding mask such as a reticle requires very high preciseness in the alignment of the light shielding mask and takes a long period of time.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com