About: http://webisa.webdatacommons.org/172113194

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate may be a layer of an insulating material, wherein the insulating material may be silicon oxide, or may be a dielectric such as silicon nitride and aluminum oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com