About: http://webisa.webdatacommons.org/172124266

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The shallow trench isolation structures (20A, 20B, 20C, 20D) include a dielectric material such as silicon oxide, silicon oxynitride, silicon nitride, or a combination thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au