About: http://webisa.webdatacommons.org/172181688

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 30 is preferably a semiconductor substrate made from such materials as silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es