About: http://webisa.webdatacommons.org/172319596

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method according to claim 69, wherein the cleaning system includes a component with which the final optical element is cleaned, the substrate table including the component.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com