About: http://webisa.webdatacommons.org/172357669

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposition surface may include a patterned feature such as a hole, trench or other opening and the method provides for conformal or nearly conformal filling of the feature.
http://www.w3.org/ns/prov#wasQuotedFrom	justia.com