About: http://webisa.webdatacommons.org/172728656

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Still further, in the case that the material is a silicon nitride film formed by LPCVD, then the material particularly has a gettering effect.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com