About: http://webisa.webdatacommons.org/17296707

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a cross-section through a representative stack disposed on a substrate at the beginning of a low-K etching step, where the photoresist layer is still present.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com