About: http://webisa.webdatacommons.org/173344248

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first interlayer insulating layer 107 may be formed from an insulator such as silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, or siloxane.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com