About: http://webisa.webdatacommons.org/173373728

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The passivation layer may comprise a dielectric material such silicon nitride or silicon dioxide and may be applied by known methods such as PECVD or sputter deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr