About: http://webisa.webdatacommons.org/17342001

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A SiO2 layer can also be grown on exposed surfaces of the substrate 72A using an oxidizing atmosphere such as steam and O2 at an elevated temperature (e.g., 950??? C.).
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk