About: http://webisa.webdatacommons.org/173497549

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Though the foregoing process is an example in which use is made of such techniques as photolithography and etching, this does not impose a limitation upon the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com