| http://www.w3.org/ns/prov#value | - The gate insulating layer may include inorganic insulating materials, such as silicon oxide SiOx or silicon nitride SiNx, and the source/drain patterns may include metallic materials, such as Cr, MoW, Cr/Al, Cu, Al(Nd), Mo/Al, Mo/Al(Nd), and Cr/Al(Nd).
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