About: http://webisa.webdatacommons.org/173572143

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, as shown in FIG. 20(d), a conductive thin film 208 is formed on the patterns made of the photoresist 206 by sputtering, electroless plating or other methods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com