About: http://webisa.webdatacommons.org/173630445

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The photomask includes a first region including a first plurality of sub-resolution features and a second region including a second plurality of sub-resolution features.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org