About: http://webisa.webdatacommons.org/173776800

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The passivation layer can be formed by using a reactive sputtering method, and particularly in this case it is preferred to take the form of a SiOX NY passivation layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com