About: http://webisa.webdatacommons.org/173829511

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 202 is coated with the insulating film 204, which is preferably made of silicon nitride, but other materials can be used, such as silicon oxide or ceramic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca