| http://www.w3.org/ns/prov#value | - The flow rate for introducing the nitrogen-containing precursor is typically between about 100 sccm and about 5,000 sccm, such as between about 250 sccm and about 1,000 sccm, and the flow rate for introducing the silicon-containing precursor is between about 5 sccm and about 500 sccm, such as between about 50 sccm and about 150 sccm.
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