About: http://webisa.webdatacommons.org/174058024

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protective film in the present invention was a silicon nitride film or a DLC film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es