About: http://webisa.webdatacommons.org/174105542

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The areas other than the area where the SiN layer 7 is exposed, are covered with the doped silicon layer 10, and with the plug 13 and side wall 15 made of doped silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com