About: http://webisa.webdatacommons.org/174111244

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, for technologies such as MEMS, cost depends on device complexity???in effect, how much integration between IC electronics and micromechanics has been accomplished.
http://www.w3.org/ns/prov#wasQuotedFrom	nap.edu