About: http://webisa.webdatacommons.org/174209682

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These layers may be formed by vapor deposition, i.e., evaporation or sputtering, although other processes such as plating or chemical vapor deposition (CVD) may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com