About: http://webisa.webdatacommons.org/174223924

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention also relates to thin films and their use of using the sputtering target and other applications, such as coatings, solar devices, semiconductor devices etc.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org