About: http://webisa.webdatacommons.org/174285418

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sensor of claim 11 wherein the absorbing layer is a material selected from a group consisting of TiN, TaN, Ni, SiNx, and a combination of the above-mentioned layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com