About: http://webisa.webdatacommons.org/174287391

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The via layer 102 includes via plugs 121 and 122 made of heavy metal such as tungsten.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com