About: http://webisa.webdatacommons.org/174311409

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The shield is an electrically conductive surface located between the substrate surface and the sources of the ion beam and the electron beam together with the detectors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com