| http://www.w3.org/ns/prov#value | - This fourth photolithography mask 164 exposes an area corresponding to the planar shape of the probe main body portion 122 a, which is an area including a portion of the deposited probe tip portion 122 b that will be buried in the probe main body portion 122 a, in order to form the remaining part of the probe main body portion 122 a.
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