About: http://webisa.webdatacommons.org/174341677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This makes it possible to appropriately transfer the pattern such as reticle or the like on the photoresist, and the resist mask 11 of any desired shape can be obtained.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr