About: http://webisa.webdatacommons.org/174344613

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The exposure apparatus according to claim 27, wherein the adhesive layer is a layer which is obtained by etching the light irradiated surface with hydrogen fluoride. 30.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr