About: http://webisa.webdatacommons.org/174451139

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Of course, the polymers and other ingredients in the active layer should be stable at the process temperature, and if the polymer is sensitive to oxygen at higher temperatures, an inert atmosphere, such as nitrogen, may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com