About: http://webisa.webdatacommons.org/174485804

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If a target made of a material such as Ta is used and O2 is supplied, chemical sputtering of TaO or the like can be performed in the same manner.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com