| http://www.w3.org/ns/prov#value | - Although the insulating layers 207 a and 207 b are not particularly limited, they are preferably made from heat resistant substrates that can withstand a temperature of 350??? C. or more, e.g., an inorganic material such as silicon oxide, silicon nitride, silicon nitride containing several % of oxygen and silicon oxide containing several % of nitrogen.
|
